Diamond like Carbon Films Obtained by Ionized Deposition

Deposition of Diamond-like Carbon films using Dense Plasma Focus

Diamond Like Carbon (DLC) films were deposited on quartz substrates using Dense Plasma Focus (DPF) method. The formation of sp bonds as is it’s content in the film strongly depends on the substrate and it seems quartz is not a suitable substrate. However, we report here the formation of DLC films on quartz substrates that were maintained at elevated temperatures and show the content of carbon a...

Deposition and characterization of ultra thin diamond like carbon films

Amorphous hydrogenated and/or nitrogenated carbon films, a-C:H/a-C:N, in overall thickness up to 2 nm are materials of choice as a mechanical and corrosion protection layer of the magnetic media in modern hard disk drive disks. In order to obtain high density and void-free films the sputtering technology has been replaced by different plasma and ion beam deposition techniques. Hydrocarbon gas p...

Nitrogen and Aluminum Doped Diamond-like Carbon Thin Films by Dc Magnetron Sputtering Deposition

Diamond-like carbon (DLC) thin films used in this study were prepared with DC magnetron sputtering deposition. Silicon (100) wafers were used as the substrates onto which an RF bias was applied during the film deposition. For the nitrogen doped DLC films, a pure graphite target was used as the carbon source and nitrogen gas was introduced into the deposition chamber via a mass flow controller. ...

Fast deposition of diamond-like carbon films by radio frequency hollow cathode method

24 Tribology of Diamond , Diamond - Like Carbon , and Related Films

Diamond, diamond-like carbon (DLC), and other related materials (i.e., carbon nitride and cubic boron nitride [CBN]) are some of the hardest materials known and offer several other outstanding properties, such as high mechanical strength, chemical inertness, and very attractive friction and wear properties, that make them good prospects for a wide range of tribological applications, including r...